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Welcome to The J. Mike Walker '66 Department of Mechanical Engineering at Texas A&M University!
Learn more about the fabrication equipment available in the J. Mike Walker '66 Department of Mechanical Engineering. Equipment manuals are available upon request.

Equipment Details

Sputtering System (AJA Orion 5)

Sputtering System (AJA Orion 5)(DRTY 108)

AJA International ATC Orion Series Sputtering Systems are compact versions of the popular ATC Flagship Series physical vapor deposition tools designed to deliver maximum performance for limited budgets. These HV and UHV systems inherit many design features and common parts from the highly evolved ATC sputtering tools. The standard ATC Orion modules (chambers, frames, cluster flanges, etc.) are generally in stock at AJA thereby reducing delivery times. 

A special version of the Orion 8 is also available that features (4) 2" magnetron sputtering sources with in-situ tilt capability. ATC Orion Systems can also be easily connected to each other or to other ATC Systems for multi-chamber (e.g. metal/oxide) or multi-technique (e.g. sputter/evaporation/PLD/ion milling) configurations.

Specifications:

  • Five 2” sputter guns
  • Quartz crystal thickness monitor
  • Substrate holder:
    • Substrates up to 4” diameter
    • Continuous motorized rotation (0-20 RPM) with controller
    • Radiant heating to 850 ℃ with quartz halogen lamps
  • Substrate RF bias during Sputter Deposition
  • Computer control       
  • Deposition Uniformity: Better than +/- 2.5% over a 4” diameter wafer
  • Base Vacuum: Better than or equal to 5.0x10^-8 Torr
  • Pumpdown to 5x10^-7 Torr in 30 minutes or less from clean, dry, and empty after N2 vent
  • Maximum deposition rates for Ti (2 Å/sec) and SiO2 (0.5 Å/sec)

Metal evaporation chamber

Metal Evaporation Chamber (JCAIN 308)

The Denton Bench Top Turbo-IV (BTT-IV) is a high vacuum thin film deposition system. It can support up to two sources for co-deposition, and can be used for evaporation with thermal resistance, high vacuum carbon coating, sputtering for sample preparation, aperture cleaning, and rotary shadowing.

Specifications:

  • Ultimate vacuum: 5 x 10-6 torr
  • Vacuum System: 70 liter/sec turbomolecular pump, oil mechanical pump

Atomic Layer Deposition (ALD) System (JCAIN 321)

The Ultratech / Cambridge NanoTech Savannah S200 ALD System delivers outstanding deposition results and provides maximum experimental flexibility for ALD research, development and production applications. It allows atomic-level control over the thickness (sub nanometer to tens of nanometer) and composition of the deposit on material surface. It is capable of thin-film deposition or coating on particles or porous materials. Three precursors are currently available enabling the deposition of TiO2, MgO, and Al2O3. Other precursors are available upon request. It is location at JCAIN 321.

Specifications:

  • Deposit on flat substrates up to 200mm in diameter
  • Maximum substrate temp - 350 C
  • Deposition uniformity < 1% (Al2O3)
  • UP to 6 lines available for precursors
  • Particle coating attachment
  • Ozone generator

Data examples from the Atomic Layer Deposition System.
Data samples from the Atomic Layer Deposition System featuring TEM images of TiO2 nano films.



Cress Single Furnace

Cress Single Furnace (JCAIN 320)

The Cress Single Furnace can be used for hardening samples and controlling the process temperatures up to 2250 °F (1230 oC)

Specifications:

  • Maximum intermittent temperature: 2250 °F (1230 oC)
  • Maximum continuous temperature: 2100 °F (1150 oC) 
  • Controls:  Autotuning microprocessor-based controller
  • Heating element: High-temperature iron-aluminum wire

 

Cress Double Furnace

Cress Double Furnace (JCAIN 320)

The Cress Double Furnace (Dual Chamber Furnace, C2121) provides two separately controlled heating chambers within a minimum floor space. The furnace is designed for hardening the surface. The two chambers allow immediate tempering or drawing after quench without waiting for the hardening furnace to cool to the lower temperature required.

Specifications:

Upper Chamber
  • Maximum intermittent temperature: 2250 °F 
  • Maximum continuous temperature: 2100 °F 
Lower Chamber 
  • Maximum intermittent temperature: 1250 °F 
  • Maximum continuous temperature: 1100 °F
  • Controls:  Autotuning microprocessor-based controls with  ¼ of 1% accuracy.
  • Heating element: Alloy wire elements coiled and mounted on the side walls.

 

HV-50 Autoclave

HV-50 Autoclave (JCAIN 308)

The HV-50 Autoclave can be used to sterilize equipment, tools (glass, ceramic, metal, or rubber), liquid (water, media, reagents), agar, and biohazardous waste using high pressures and high temperatures, and agar. The autoclave has a programmable auto-start for initiating a cycle up to 1 week later and a dual-sensing lid interlock which prevents lid opening when the chamber is pressurized or when the temperature exceeds 97°C.

Specifications:

  • Chamber capacity: 50 liters
  • Sterilization temperature range: 105 °C to 135 °C 
  • Pressure gauge range: 3 to 30 psi (0.02 to 0.206MPa)
  • Maximum allowable gauge pressure: 38 psi (0.26MPa)
  • Sterilization timer: 1 min to 250 min 
  • Auto-start timer: 1 min to 7 days 

 

Salt Spray Chamber (JCAIN 309)

The Salt Spray Chamber is designed to test a material's ability to resist erosion effects caused by brine (salt water). Such materials may be included in electrical appliances, electrical hardware, and other accessories. All testing chambers can perform Brine and Cupric Acetate tests. A single testing period can be set from 0.01s to 9999h.

Specifications:

  • Internal dimensions (WxDxH): 64″ x 40″ x 20″
  • External dimensions (WxDxH): 100″ x 52″ x 56″
  • Test chamber volume: 800L (28.2 cu ft)
  • Solution reservoir volume*1: 40L (1.4 cu ft)
  • Removable slotted sample rods: 16 rods (12 shelves)
  • Atomizing nozzle: 2 pc
  • Cover Lifter: Available/td>
  • Unattended operating days: 7
  • Bubble tower volume: 4L(0.14 cu ft)
  • Construction: PVC
  • Color: Gray
  • Temperature range: Up to +60° C (Test chamber)
  • Temperature precision: ±0.1°C 
  • PVC construction: Up to +70° C (Bubble tower)
  • Salt fog collection rates: Adjustable from 1.0 to 2.0 ml per 80 cm² per hour
  • Spray pressure: 0.8~2.0kgf/cm² (powered by compressed air)
  • Power supply: 3 phase, Power source dependent on country/region of installation
  • Exhaust: Exhaust pipe should be installed outside the building
  • Drain: Drainpipe should be installed into floor level drain