• Associate Professor, Mechanical Engineering
  • Morris E. Foster Faculty Fellow II
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ChaBum Lee

Educational Background

  • Postdoctoral research, Mechanical Engineering, University of South Carolina — 2013
  • Ph.D., Mechatronics, Gwangju Institute of Science and Technology — 2012
  • M.S., Mechatronics, Gwangju Institute of Science and Technology — 2008
  • B.S., Mechanical Engineering, Chung-Ang University — 2006

Research Interests

    • Semiconductor metrology and inspection
    • Interferometry for length, surface and volume measurements.
    • Three-dimensional imaging
    • Machine tool metrology
    • Dynamic system (mechatronics) metrology and inspection
    • Robotic machining processes
    • Magnetic/Electric/Optical spectroscopy

Awards & Honors

  • 2021 Emerging Leaders, Institute of Physics
  • 2020 ASME Blackall Machine Tool and Gage Award
  • 2019 Best Alumni Award, GIST
  • 2017 Kinslow Research Award (Honorable Mention) at TN Tech
  • 2017 American Society for Precision Engineering Best Researcher Award
  • 2017 Research and Economic Development Award at TN Tech

Selected Publications

  • Pengfei Lin, Kuan Lu, and ChaBum Lee, A Novel Method for Through-Silicon Via Characterization based on Diffraction Fringe Analysis, Ultramicroscopy, 272 114136 (2025)
  • Kuan Lu, Byunggi Kim, Masahiro Nomura, Jiyong Park, and ChaBum Lee, Silicon-via (Si-via) Hole Metrology and Inspection by Grayfield Edge Diffractometry, Journal of Manufacturing Processes, 133, pp. 503-509 (2025). https://doi.org/10.1016/j.jmapro.2024.11.086
  • Kuan Lu, Pengfei Lin, and ChaBum Lee, A Digital Approach to Via Edge Roughness Characterization and Quantification, International Journal of Precision Engineering and Manufacturing-Smart Technology, 2(2), pp. 93-99 (2024)
  • Kuan Lu and ChaBum Lee, Hole Edge Metrology and Inspection by Edge Diffractometry, Journal of Manufacturing Science and Engineering, Vol 146, 070905 (2024).
  • Zhikun Wang, Pengfei Lin, Phuc Nguyen, Jingyan Wang, and ChaBum Lee, Characterization of Photomask Patterns and Lithography-printed Patterns, Precision Engineering, 88, pp. 235-240 (2024) https://doi.org/10.1016/j.precisioneng.2024.02.006
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