- Professor Emeritus, Chemical Engineering
- Fellow of National Academy of Inventors
- Email: yuekuo@tamu.edu
Educational Background
- Ph.D., Columbia University - 1979
- M.S., Columbia University - 1978
- B.S., National Taiwan University, Taipei, Taiwan - 1974
Research Interests
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- Nano and microelectronics with special interests in semiconductor materials, processes and devices as well as thin films and plasma technology.
- New materials, novel processes and advanced devices with the ultimate goal of creating high-performance, highly reliable, manufacturable devices for current and future applications.
- Devices under studies are TFTs, ULSIC, SSI-LEDs, solar cells, bio and optical sensors, etc.
Awards & Honors
- Fellow of IEEE (Life), ECS, AVS, and MRS
- Fellow of National Academy of Inventors (NAI).
- President, Electrochemical Society, 2018-2019
- IEEE EDS J.J. Ebers Award
- SID Special Recognition Award
- ECS Edward G. Acheson Award
- ECS Gordon E. Moore Medal
- ECS Electronics and Photonics Division Award
- Pan Wen Yuan Foundation Distinguished Research Achievement Award
- National Taiwan University Chemical Engineering Department Distinguished Alumni Award
- Texas A&M Distinguished Research Achievement Award
- Texas A&M System Innovation Award
- 10 IBM Technology and Invention Awards
- 236 plenary, keynote, and invited speeches
Selected Publications
- Y. Kuo and J. Q. Su, “A CO₂ Plasma Based Room-Temperature Copper Etch Process,” ECS J. Solid State Sci. Technol., 024006 (2026).
- T.-C. Chiang, Y.-M. Zhang, J.-L. Chen, C.-K. Hsu, Y. Kuo, and P.-T. Liu, “Interface-Engineered Top-Gate Indium-Tin-Oxide Thin-Film Transistors with 2-nm Channels,” Appl. Phys. Lett., 128, 113502 (2026).
- Y. Kuo and A. Nathan, invited, “The Thin Film Transistor,” IEEE EDS Special Issue of The FET Centennial - Celebrating the Field-Effect Transistor, Wiley, Accepted 08/2025.
- Y. Kuo, H. Hosono, M. Shur, and J. Jang, Oxide Thin Film Transistors, Wiley, 2024.
- J. Q. Su and Y. Kuo, “Study on Oxygen Plasma-Based Copper Etching Process,” ECS J. Solid State Sci. Technol., 13 114001 (2024).
- Y. Kuo, invited “Thin Film Transistor Array Based Active Matrix Flat Panel Displays – Past and Next Application in Immersive Displays,” inauguration issue of IEEE Open Journal of Immersive Displays, 28-40, January 2024.
- Y.-C. Chiu, M. Deb, P.-T. Liu, H.-W. Zan, Y.-R. Shih, Y. Kuo, D.-B. Ruan, K.-J. Gan, and C.-C. Hsu, “Sputtered Ultra-thin WO3 for Realizing Room Temperature High Sensitive NO2 Gas Sensors,” ACS Appl. Elec. Mat., 5(11), 5831-5840 (2023).
- Y. Kuo, J. Jang, and A. Nathan, “The Thin Film Transistor and Emergence of Large Area, Flexible Electronics and Beyond,” Chapt. 21, IEEE Special Anniversary Commemorative Volume to Celebrate The 75th Year Invention of Transistor, pp. 263-271, Wiley (2023).
- Z.-H. Li, T.-C. Chiang, P.-Y. Kuo, C.-H. Tu, Y. Kuo and P.-T. Liu, “Heterogeneous Integration of Atomically-Thin Indium Tungsten Oxide Transistors for Low-Power Three-Dimensional Monolithic Complementary Inverter, ” Adv. Sci., 10(9), 2205481 (9 pages) (2023).
- A. Samuel and Y. Kuo, “Estimation of the Emission Characteristics of Solid-State Incandescent Light Emitting Devices by Linear Regression of Spectral Radiance,” Solid-State Electronics, 204, 108651 (2023).